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Other articles related with "replacement fin processing"：
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87303 |
Ying Zan(昝颖), Yong-Liang Li(李永亮), Xiao-Hong Cheng(程晓红), Zhi-Qian Zhao(赵治乾), Hao-Yan Liu(刘昊炎), Zhen-Hua Hu(吴振华), An-Yan Du(都安彦), Wen-Wu Wang(王文武) |
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High crystalline quality of SiGe fin fabrication with Si-rich composition area using replacement fin processing |
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Chin. Phys. B
2020 Vol.29 (8): 87303-087303
[Abstract]
(549)
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[PDF 2270 KB]
(90)
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